Publication:

Scaling down of MOCVD HfSiON to 1nm EOT

Date

2007
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Shi, Xiaoping
;
Rothschild, Aude
;
Everaert, Jean-Luc
;
Van Elshocht, Sven  
;
Date, Lucien  
;
Schaekers, Marc  

Journal

Abstract

Description

Statistics

Views

1817 since deposited on 2021-10-16
Acq. date: 2026-07-18

Citations

Statistics

Views

1817 since deposited on 2021-10-16
Acq. date: 2026-07-18

Citations