Publication:

Nanoscale stress measurements through advanced Raman spectroscopy

Date

2017
Proceedings Paper
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dc.contributor.authorNuytten, Thomas
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-24T10:16:13Z
dc.date.available2021-10-24T10:16:13Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29094
dc.source.conferenceE-MRS Spring Meeting
dc.source.conferencedate21/05/2017
dc.source.conferencelocationStrasbourg France
dc.title

Nanoscale stress measurements through advanced Raman spectroscopy

dc.typeProceedings paper
dspace.entity.typePublication
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