Publication:
Characterization of extreme ultraviolet resists with interference lithography
Date
| dc.contributor.author | Solak, Harun H. | |
| dc.contributor.author | Ekinci, Yasin | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Jouve, Amandine | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-16T05:20:32Z | |
| dc.date.available | 2021-10-16T05:20:32Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11256 | |
| dc.source.conference | 31st International Conference on Micro-and Nano- Engineering | |
| dc.source.conferencedate | 19/09/2005 | |
| dc.source.conferencelocation | Vienna Austria | |
| dc.title | Characterization of extreme ultraviolet resists with interference lithography | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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