Publication:
Interactions at the interface between top-coat and resist
Date
| dc.contributor.author | Okumura, Haruki | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Nakanishi, Kana | |
| dc.contributor.author | Kishimura, Shinji | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-16T03:45:22Z | |
| dc.date.available | 2021-10-16T03:45:22Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10952 | |
| dc.source.conference | 2nd International Symposium on Immersion Lithography | |
| dc.source.conferencedate | 12/09/2005 | |
| dc.source.conferencelocation | Brugge Belgium | |
| dc.title | Interactions at the interface between top-coat and resist | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |