Publication:

Influence of the substrate on the lifetime of capacitive RF MEMS switches

Date

2008-01
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.contributor.authorEkkels, Phillip
dc.contributor.authorMuller, Philippe
dc.contributor.authorNolmans, Philip
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-17T06:40:50Z
dc.date.available2021-10-17T06:40:50Z
dc.date.embargo9999-12-31
dc.date.issued2008-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13580
dc.source.beginpage172
dc.source.conference21st IEEE International Conference on Micro Electro Mechnical Systems - MEMS
dc.source.conferencedate13/01/2008
dc.source.conferencelocationTucson, AZ USA
dc.source.endpage175
dc.title

Influence of the substrate on the lifetime of capacitive RF MEMS switches

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
14849.pdf
Size:
779.96 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions