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Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity
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1918 since deposited on 2021-10-19
1last month
Acq. date: 2026-01-08
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1918 since deposited on 2021-10-19
1last month
Acq. date: 2026-01-08
Citations