Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions

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Author(s)

Bargallo Gonzalez, Mireia

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Verheyen, Peter

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Hikavyy, Andriy

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Okuno, Yasutoshi

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Vissouvanadin Soubaretty, Bertrand

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Van Daele, Benny

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Machkaoutsan, Vladimir

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Weijtmans, J.W.

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1977 since deposited on 2021-10-16

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Acq. date: 2025-12-08