Publication:

Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions

Date

2007

Proceedings Paper

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14910.pdf 114.36 KB

Author(s)

Bargallo Gonzalez, Mireia

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Verheyen, Peter

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Hikavyy, Andriy

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Okuno, Yasutoshi

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Vissouvanadin Soubaretty, Bertrand

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Van Daele, Benny

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Machkaoutsan, Vladimir

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Weijtmans, J.W.

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