Publication:

Analysis of the pre-epi bake conditions on the defect creation in recessed Si1-xGex S/D junctions

Date

2007
Proceedings Paper
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Author(s)

Bargallo Gonzalez, Mireia
;
Thomas, Nicole
;
Simoen, Eddy  
;
Verheyen, Peter  
;
Hikavyy, Andriy  
;
Leys, Frederik
;
Okuno, Yasutoshi
;
Vissouvanadin Soubaretty, Bertrand
;
Van Daele, Benny
;
Geenen, Luc
;
Loo, Roger  
;
Claeys, Cor
;
Machkaoutsan, Vladimir  
;
Tomasini, P.
;
Thomas, S.G.
;
Lu, J.P.
;
Weijtmans, J.W.
;
Wise, R.

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