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High mobility channel materials and novel devices for scaling of nanoelectronics beyond the Si roadmap

Date

2009
Proceedings Paper
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dc.contributor.authorHeyns, Marc
dc.contributor.authorBellenger, Florence
dc.contributor.authorBrammertz, Guy
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorDelabie, Annelies
dc.contributor.authorEneman, Geert
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHoussa, Michel
dc.contributor.authorLeonelli, Daniele
dc.contributor.authorLin, Dennis
dc.contributor.authorMartens, Koen
dc.contributor.authorMerckling, Clement
dc.contributor.authorMeuris, Marc
dc.contributor.authorMitard, Jerome
dc.contributor.authorPenaud, Julien
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorScarrozza, Marco
dc.contributor.authorSimoen, Eddy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorLeonelli, Daniele
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.date.accessioned2021-10-17T22:54:02Z
dc.date.available2021-10-17T22:54:02Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15475
dc.source.beginpage1194-A07-01
dc.source.conferenceHigh-k Dielectrics on Semiconductors with High Carrier Mobility
dc.source.conferencedate30/11/2009
dc.source.conferencelocationBoston, MA USA
dc.title

High mobility channel materials and novel devices for scaling of nanoelectronics beyond the Si roadmap

dc.typeProceedings paper
dspace.entity.typePublication
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