Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance

dc.contributor.author	Xu, Kaidong
dc.contributor.author	Pichler, Stephan
dc.contributor.author	Wostyn, Kurt
dc.contributor.author	Cado, Gwenaelle
dc.contributor.author	Springer, Clement
dc.contributor.author	Gale, Glenn
dc.contributor.author	Dalmer, Michael
dc.contributor.author	Mertens, Paul
dc.contributor.author	Bearda, Twan
dc.contributor.author	Gaulhofer, Ernst
dc.contributor.author	Podlesnik, D
dc.contributor.imecauthor	Wostyn, Kurt
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.orcidimec	Wostyn, Kurt::0000-0003-3995-0292
dc.date.accessioned	2021-10-18T05:28:41Z
dc.date.available	2021-10-18T05:28:41Z
dc.date.issued	2009
dc.identifier.issn	1662-9779
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16568
dc.identifier.url	www.scientific.net
dc.source.beginpage	31
dc.source.endpage	34
dc.source.journal	Solid State Phenomena
dc.source.volume	145-146
dc.title	Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance
dc.type	Journal article
dspace.entity.type	Publication
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