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Investigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 background
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Investigation on the corrosion of Cu metallization in the focused ion beam system due to a low I2 background
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Date
1999
Proceedings Paper
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3189.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Jin, S.
;
Vervoort, Iwan
;
Lantasov, Yuri
Journal
Abstract
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1922
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-10
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Metrics
Views
1922
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-10
Citations