Composition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approach

dc.contributor.author	Franquet, Alexis
dc.contributor.author	Douhard, Bastien
dc.contributor.author	Conard, Thierry
dc.contributor.author	Melkonyan, Davit
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Franquet, Alexis
dc.contributor.imecauthor	Douhard, Bastien
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Franquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.date.accessioned	2021-10-23T10:53:28Z
dc.date.available	2021-10-23T10:53:28Z
dc.date.issued	2016
dc.identifier.issn	1071-1023
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/26634
dc.identifier.url	http://scitation.aip.org/content/avs/journal/jvstb/34/3/10.1116/1.4943950
dc.source.beginpage	03H127
dc.source.issue	3
dc.source.journal	Journal of Vacuum Science and Technology B
dc.source.volume	34
dc.title	Composition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approach
dc.type	Journal article
dspace.entity.type	Publication
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