Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Corrosion of Co in BEOL interconnects in dilute HF solution
Publication:
Corrosion of Co in BEOL interconnects in dilute HF solution
Copy permalink
Date
2018
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Akanishi, Yuya
;
Kesters, Els
;
Le, Quoc Toan
;
Holsteyns, Frank
Journal
Abstract
Description
Metrics
Views
1987
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1987
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-16
Citations