A BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITS

Edinger, Pierre; Takabayashi, Alain Yuji; Errando-Herranz, Carlos; Khan, Umar; Antony, Cleitus; Talli, Giuseppe; Verheyen, Peter; Bogaerts, Wim; Quack, Niels; Gylfason, Kristinn B.

doi:10.1109/MEMS51670.2022.9699739

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A BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITS

Date

2022

Proceedings Paper

https://doi.org/10.1109/MEMS51670.2022.9699739

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Edinger, Pierre

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Takabayashi, Alain Yuji

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Errando-Herranz, Carlos

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Gylfason, Kristinn B.

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35th IEEE International Conference on Micro Electro Mechanical Systems Conference (IEEE MEMS)

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Acq. date: 2026-01-08

A BISTABLE SILICON PHOTONIC MEMS PHASE SWITCH FOR NONVOLATILE PHOTONIC CIRCUITS

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