Publication:
Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization
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1802 since deposited on 2021-10-24
2last month
Acq. date: 2026-08-25
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Statistics
Views
1802 since deposited on 2021-10-24
2last month
Acq. date: 2026-08-25
Citations