Publication:
Sandwich stacks replacing SiO2 in standard bonded Si-on-insulator (SOI) substrates to obtain a high-thermal conductivity HTC-SOI substrate
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1995 since deposited on 2021-10-17
Acq. date: 2025-10-23
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Views
1995 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations