Publication:
Scalpel SPM toward the three-dimensional characterization of confined volumes (tutorial)
Date
| dc.contributor.author | Celano, Umberto | |
| dc.contributor.imecauthor | Celano, Umberto | |
| dc.contributor.orcidimec | Celano, Umberto::0000-0002-2856-3847 | |
| dc.date.accessioned | 2021-10-23T10:12:43Z | |
| dc.date.available | 2021-10-23T10:12:43Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26402 | |
| dc.identifier.url | http://www.iirw.org/program/tutorial-program/ | |
| dc.source.conference | IEEE International Integrated Reliability Workshop - IIRW | |
| dc.source.conferencedate | 9/10/2016 | |
| dc.source.conferencelocation | Fallen Leaf Lake, CA USA | |
| dc.title | Scalpel SPM toward the three-dimensional characterization of confined volumes (tutorial) | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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