Publication:
A discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectrics
Date
| dc.contributor.author | Mogilnikov, K.P. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Petkov, M.P. | |
| dc.date.accessioned | 2021-10-15T14:57:28Z | |
| dc.date.available | 2021-10-15T14:57:28Z | |
| dc.date.issued | 2004-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9317 | |
| dc.source.beginpage | 247 | |
| dc.source.endpage | 248 | |
| dc.source.issue | 1 | |
| dc.source.journal | Japanese Journal of Applied Physics. Part 1: Regular Papers | |
| dc.source.volume | 43 | |
| dc.title | A discussion of the practical importance of positron annihilation lifetime spectroscopy percolation threshold in evaluation of porous low-k dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |