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Germanium surface passivation and atomic layer deposition of high- k dielectrics - a tutorial review on Ge-based MOS capacitors
Publication:
Germanium surface passivation and atomic layer deposition of high- k dielectrics - a tutorial review on Ge-based MOS capacitors
Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Xie, Qi
;
Deng, Shaoren
;
Schaekers, Marc
;
Lin, Dennis
;
Caymax, Matty
;
Delabie, Annelies
;
Qu, Xin-Ping
;
Jiang, Yu-long
;
Deduytsche, Davy
;
Detavernier, Christophe
Journal
Semiconductor Science and Technology
Abstract
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1939
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1939
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations