Publication:

Multi-node scaling potential of monolithic CFET

 
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dc.contributor.authorYang, Sheng
dc.contributor.authorVerschueren, Lynn
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorKükner, Halil
dc.contributor.authorLin, Ji-Yung
dc.contributor.authorBufler, Fabian
dc.contributor.authorSankatali, Venkateswarlu
dc.contributor.authorFarokhnejad, Anita
dc.contributor.authorVan de Put, Maarten
dc.contributor.authorHellings, Geert
dc.date.accessioned2026-07-23T08:25:29Z
dc.date.available2026-07-23T08:25:29Z
dc.date.createdwos2026
dc.date.issued2025
dc.description.abstractThis paper explores design strategies and Power-Performance-Area (PPA) trade-offs for scaling monolithic Complementary FETs (CFETs) from the A7 to A3 technology nodes. At A7 node, we demonstrate gate and Middle-of-Line (MOL) parasitic capacitance optimization to match N2 node performance. At A5 node, an Omega-gate Forksheet (O-FS) architecture keeps performance at the same level at lower sheet width. At A3 node, asymmetric crystal orientation engineering enhances drive current and supports aggressive area scaling targets.
dc.description.wosFundingTextThis work has been enabled in part by the NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe programs (101183277), as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania. For more information, visit nanoic-project.eu.
dc.identifier.doi10.1109/iedm50572.2025.11353555
dc.identifier.isbn979-8-3315-6786-6
dc.identifier.issn2380-9248
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59909
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherIEEE
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedate2025-12-06
dc.source.conferencelocationSan Francisco
dc.source.journal2025 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, IEDM
dc.source.numberofpages4
dc.title

Multi-node scaling potential of monolithic CFET

dc.typeProceedings paper
dspace.entity.typePublication
imec.internal.crawledAt2026-07-14
imec.internal.sourcecrawler
imec.internal.wosCreatedAt2026-07-14
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