Silicon surface defects: the roles of passivation and surface contamination

dc.contributor.author	Reddy, A. J.
dc.contributor.author	Burr, T. A.
dc.contributor.author	Chan, Julia K.
dc.contributor.author	Norga, Gerd
dc.contributor.author	Michel, J.
dc.contributor.author	Kimerling, L. C.
dc.date.accessioned	2021-09-30T09:26:49Z
dc.date.available	2021-09-30T09:26:49Z
dc.date.embargo	9999-12-31
dc.date.issued	1997
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2104
dc.source.beginpage	1719
dc.source.conference	Defects in Semiconductors 19 - ICDS 19
dc.source.conferencedate	21/07/1997
dc.source.conferencelocation	Aveiro Portugal
dc.source.endpage	1724
dc.title	Silicon surface defects: the roles of passivation and surface contamination
dc.type	Proceedings paper
dspace.entity.type	Publication
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