Publication:
Thinking outside the box for improved overlay metrology
Date
| dc.contributor.author | Pollentier, Ivan | |
| dc.contributor.author | Leray, Philippe | |
| dc.contributor.author | Laidler, David | |
| dc.contributor.author | Adel, M. | |
| dc.contributor.author | Ghinovker, M. | |
| dc.contributor.author | Poplawski, J. | |
| dc.contributor.author | Kassel, E. | |
| dc.contributor.author | Izikson, P. | |
| dc.contributor.imecauthor | Pollentier, Ivan | |
| dc.contributor.imecauthor | Leray, Philippe | |
| dc.contributor.imecauthor | Laidler, David | |
| dc.contributor.orcidimec | Pollentier, Ivan::0000-0002-4266-6500 | |
| dc.contributor.orcidimec | Laidler, David::0000-0003-4055-3366 | |
| dc.date.accessioned | 2021-10-15T06:13:12Z | |
| dc.date.available | 2021-10-15T06:13:12Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8030 | |
| dc.source.beginpage | 12 | |
| dc.source.issue | 2 | |
| dc.source.journal | Yield Management Solutions | |
| dc.source.volume | 5 | |
| dc.title | Thinking outside the box for improved overlay metrology | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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