Publication:
Scatterometry solutions for 14nm half-pitch BEOL layers patterned by EUV single exposure
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1987 since deposited on 2021-10-31
3last month
Acq. date: 2026-01-25
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Statistics
Views
1987 since deposited on 2021-10-31
3last month
Acq. date: 2026-01-25
Citations