Publication:

A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates

Date

2002
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Author(s)

Satta, Alessandra
;
Schuhmacher, Jörg
;
Whelan, Caroline
;
Vandervorst, Wilfried  
;
Brongersma, Sywert  
;
Beyer, Gerald  
;
Brijs, Bert
;
Conard, Thierry  
;
Maex, Karen  
;
Vantomme, Andre  
;
Viitanen, M.M.
;
Brongersma, H.H.

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Abstract

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