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A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
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2086 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
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Views
2086 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
Citations