Publication:
From ULSI to microsystems and nanotechnology
Date
| dc.contributor.author | Borghs, Gustaaf | |
| dc.contributor.imecauthor | Borghs, Gustaaf | |
| dc.date.accessioned | 2021-10-14T21:11:08Z | |
| dc.date.available | 2021-10-14T21:11:08Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6058 | |
| dc.source.conference | 8th World Micromachine Summit | |
| dc.source.conferencedate | 30/04/2002 | |
| dc.source.conferencelocation | Maastricht The Netherlands | |
| dc.title | From ULSI to microsystems and nanotechnology | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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