Publication:

EUV resist performance update on ADT and NXE:3100 scanner

Date

2011
Proceedings Paper
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Author(s)

Goethals, Mieke
;
Niroomand, Ardavan
;
Hosokawa, Kohei
;
Van Roey, Frieda  
;
Pollentier, Ivan  
;
Van Den Heuvel, Dieter  

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