Publication:

Cleaning of nanoparticles in semiconductor manufacturing

Date

2004
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorVereecke, Guy
dc.contributor.authorArnauts, Sophia
dc.contributor.authorDoumen, Geert
dc.contributor.authorEitoku, Atsuro
dc.contributor.authorFransaer, J.
dc.contributor.authorFyen, Wim
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorKenis, Karine
dc.contributor.authorLee, Kuntack
dc.contributor.authorLux, Marcel
dc.contributor.authorSnow, Jim
dc.contributor.authorVinckier, Chris
dc.contributor.authorVos, Rita
dc.contributor.authorXu, Kaidong
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-15T17:35:24Z
dc.date.available2021-10-15T17:35:24Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9857
dc.source.conferenceBePCIS Seminar on Selected Topics in Nanotechnology
dc.source.conferencedate26/10/2004
dc.source.conferencelocationGent Belgium
dc.title

Cleaning of nanoparticles in semiconductor manufacturing

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations