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Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?

Date

1999
Proceedings Paper
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dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHuber, A.
dc.contributor.authorOnsia, Bart
dc.contributor.authorArnauts, Sophia
dc.contributor.authorKenis, Karine
dc.contributor.authorKnotter, D. M.
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-06T10:54:41Z
dc.date.available2021-10-06T10:54:41Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3352
dc.source.beginpage93
dc.source.conferenceUltra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon
dc.source.conferencedate21/09/1998
dc.source.conferencelocationOostende Belgium
dc.source.endpage96
dc.title

Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?

dc.typeProceedings paper
dspace.entity.typePublication
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