Publication:

(Sub-) 100-nm gate patterning using 248-nm alternating PSM

Date

2001

Proceedings Paper

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Files

5797.pdf 1.77 MB

Author(s)

Vandenberghe, Geert

;

Jaenen, Patrick

;

Jonckheere, Rik

;

;

Statistics

1875 since deposited on 2021-10-14

Acq. date: 2026-01-26