Publication:

Impact of reactor- and transistor-type on electron shading

Date

1999
Proceedings Paper
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dc.contributor.authorCreusen, Martin
dc.contributor.authorAckaert, J.
dc.contributor.authorDe Backer, E.
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorGroeseneken, Guido
dc.date.accessioned2021-10-06T10:50:43Z
dc.date.available2021-10-06T10:50:43Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3320
dc.source.beginpage8
dc.source.conferenceProceedings 1999 International Symposium on Plasma Process-Induced Damage - P2ID
dc.source.conferencedate09/05/1999
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage11
dc.title

Impact of reactor- and transistor-type on electron shading

dc.typeProceedings paper
dspace.entity.typePublication
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