Publication:

Implementation of the IMEC-Clean in advanced CMOS manufacturing

Date

1999
Proceedings Paper
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dc.contributor.authorMeuris, Marc
dc.contributor.authorArnauts, Sophia
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorKenis, Karine
dc.contributor.authorLux, Marcel
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorHeyns, Marc
dc.contributor.authorWolke, K.
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T11:30:51Z
dc.date.available2021-10-14T11:30:51Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3678
dc.source.beginpage157
dc.source.conferenceProceedings 1999 IEEE International Symposium on Semiconductor Manufacturing Conference
dc.source.conferencedate11/10/1999
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage160
dc.title

Implementation of the IMEC-Clean in advanced CMOS manufacturing

dc.typeProceedings paper
dspace.entity.typePublication
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