Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
H2/D2 isotopic effect on negative bias temperature instabilities in SiOx/HfSiON/TaN gate stacks
Publication:
H2/D2 isotopic effect on negative bias temperature instabilities in SiOx/HfSiON/TaN gate stacks
Copy permalink
Date
2005
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Houssa, Michel
;
Aoulaiche, Marc
;
Stesmans, Andre
;
De Gendt, Stefan
;
Groeseneken, Guido
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Views
1986
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1986
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-16
Citations