Publication:
H2/D2 isotopic effect on negative bias temperature instabilities in SiOx/HfSiON/TaN gate stacks
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1987 since deposited on 2021-10-16
Acq. date: 2026-06-07
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Statistics
Views
1987 since deposited on 2021-10-16
Acq. date: 2026-06-07
Citations