Publication:
Revealing the porous structure of low-k materials through solvent diffusion
Date
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T04:59:18Z | |
| dc.date.available | 2021-10-16T04:59:18Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11191 | |
| dc.source.beginpage | 305 | |
| dc.source.book | Materials for Information Technology. Devices, Interconnects and Packaging | |
| dc.source.endpage | 314 | |
| dc.title | Revealing the porous structure of low-k materials through solvent diffusion | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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