Publication:
Enhanced low temperature electrical activation of B in Si
Date
| dc.contributor.author | Kalyanaraman, R. | |
| dc.contributor.author | Venezia, Vincent | |
| dc.contributor.author | Pelaz, L. | |
| dc.contributor.author | Haynes, T.E. | |
| dc.contributor.author | Gossmann, H.J.L. | |
| dc.contributor.author | Rafferty, C.S. | |
| dc.date.accessioned | 2021-10-15T05:06:48Z | |
| dc.date.available | 2021-10-15T05:06:48Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7719 | |
| dc.source.beginpage | 215 | |
| dc.source.endpage | 217 | |
| dc.source.issue | 2 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 82 | |
| dc.title | Enhanced low temperature electrical activation of B in Si | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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