Publication:

SOI photonic crystal components fabricated with deep UV lithography

Date

2002
Meeting abstract
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dc.contributor.authorBogaerts, Wim
dc.contributor.authorWiaux, Vincent
dc.contributor.authorTaillaert, Dirk
dc.contributor.authorBeckx, Stephan
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-14T21:10:32Z
dc.date.available2021-10-14T21:10:32Z
dc.date.embargo9999-12-31
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6046
dc.source.beginpage40
dc.source.conferencePECS-IV: International Workshop on Photonic and Electromagnetic Crystal Structures
dc.source.conferencedate28/10/2002
dc.source.conferencelocationLos Angeles, CA USA
dc.title

SOI photonic crystal components fabricated with deep UV lithography

dc.typeMeeting abstract
dspace.entity.typePublication
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