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Particle-substrate interactions in non-aqueous media studied by colloidal probe AFM

Date

2005
Proceedings Paper
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dc.contributor.authorBarbagini, Francesca
dc.contributor.authorFyen, Wim
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorMertens, Paul
dc.contributor.authorFransaer, Jan
dc.contributor.imecauthorMertens, Paul
dc.date.accessioned2021-10-16T00:44:05Z
dc.date.available2021-10-16T00:44:05Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10060
dc.source.beginpage267
dc.source.conferenceCleaning Technology in Semiconductor Device Manufacturing IX
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
dc.source.endpage270
dc.title

Particle-substrate interactions in non-aqueous media studied by colloidal probe AFM

dc.typeProceedings paper
dspace.entity.typePublication
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