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Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation
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Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation
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Date
2004-06
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Huyghebaert, Cedric
;
Conard, Thierry
;
Brijs, Bert
;
Vandervorst, Wilfried
Journal
Applied Surface Science
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Views
1809
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-15
Citations