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Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation

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1809 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-15

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1809 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-15

Citations