Publication:
Surface characterization in microelectronics industry
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-15T17:23:18Z | |
| dc.date.available | 2021-10-15T17:23:18Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9820 | |
| dc.source.conference | Meeting Belgian Particle, Colloid & Interface Society - BEPCIS | |
| dc.source.conferencedate | 27/05/2004 | |
| dc.source.conferencelocation | Brussel Belgi� | |
| dc.title | Surface characterization in microelectronics industry | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |