Publication:
Analysis of the etch rate limiting steps in dry etching of tungsten in fluorine containing plasmas
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2032 since deposited on 2021-09-29
3last month
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Acq. date: 2026-02-27
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Statistics
Views
2032 since deposited on 2021-09-29
3last month
1last week
Acq. date: 2026-02-27
Citations