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Integration of SPER and FUSI in a pFET
Publication:
Integration of SPER and FUSI in a pFET
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Severi, Simone
;
Pawlak, Bartek
;
Veloso, Anabela
;
Duffy, Ray
;
Kottantharayil, Anil
;
Lauwers, Anne
;
Henson, Kirklen
;
de Marneffe, Jean-Francois
;
Eyben, Pierre
;
Vandervorst, Wilfried
;
De Meyer, Kristin
;
Jurczak, Gosia
;
Biesemans, Serge
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1944
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1944
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations