Publication:
Studies and optimization of HfO2 grown by HfCl4/H2O atomic layer deposition
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1857 since deposited on 2021-10-16
6last month
Acq. date: 2026-02-26
Citations
Statistics
Views
1857 since deposited on 2021-10-16
6last month
Acq. date: 2026-02-26
Citations