Publication:

Impact of line edge roughness on cell-to-cell coupling variability in NAND flash arrays

Date

2010-03
Proceedings Paper
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dc.contributor.authorPoliakov, Pavel
dc.contributor.authorBlomme, Pieter
dc.contributor.authorMiranda Corbalan, Miguel
dc.contributor.authorAnchlia, Ankur
dc.contributor.authorDobrovolny, Petr
dc.contributor.authorBrusamarello, Lucas
dc.contributor.authorStucchi, Michele
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorDehaene, Wim
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorDobrovolny, Petr
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorDehaene, Wim
dc.contributor.orcidimecDobrovolny, Petr::0000-0002-1465-481X
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-18T20:22:57Z
dc.date.available2021-10-18T20:22:57Z
dc.date.issued2010-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17816
dc.source.beginpage41
dc.source.conference11th International Conference on Ultimate Integration on Silicon - ULIS
dc.source.conferencedate17/02/2010
dc.source.conferencelocationGlasgow UK
dc.source.endpage44
dc.title

Impact of line edge roughness on cell-to-cell coupling variability in NAND flash arrays

dc.typeProceedings paper
dspace.entity.typePublication
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