Publication:

SrTiOx for sub-20 nm DRAM technology nodes - characterization and modeling

Date

2015
Journal article
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dc.contributor.authorKaczer, Ben
dc.contributor.authorLarcher, Luca
dc.contributor.authorVandelli, Luca
dc.contributor.authorReisinger, Hans
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorClima, Sergiu
dc.contributor.authorJi, Zhigang
dc.contributor.authorJoshi, Saumya
dc.contributor.authorSwerts, Johan
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorJurczak, Gosia
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.date.accessioned2021-10-22T20:00:47Z
dc.date.available2021-10-22T20:00:47Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25448
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931715002956
dc.source.beginpage126
dc.source.endpage129
dc.source.journalMicroelectronic Engineering
dc.source.volume147
dc.title

SrTiOx for sub-20 nm DRAM technology nodes - characterization and modeling

dc.typeJournal article
dspace.entity.typePublication
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