Publication:
EUV resist chemical gradient enhancement by UV flood exposure for improvement in EUV resist resolution, process control, roughness, sensitivity and stochastic defectivity
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1967 since deposited on 2021-10-29
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Acq. date: 2026-01-08
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1967 since deposited on 2021-10-29
1last month
1last week
Acq. date: 2026-01-08
Citations