Publication:
Electromigration activation energies in ruthenium interconnects
Date
| dc.contributor.author | Beyne, Sofie | |
| dc.contributor.author | Varela Pedreira, Olalla | |
| dc.contributor.author | Oprins, Herman | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Beyne, Sofie | |
| dc.contributor.imecauthor | Varela Pedreira, Olalla | |
| dc.contributor.imecauthor | Oprins, Herman | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Oprins, Herman::0000-0003-0680-4969 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-27T07:34:29Z | |
| dc.date.available | 2021-10-27T07:34:29Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32540 | |
| dc.identifier.url | https://iitc-conference.org/2019-iitc-mam-program/ | |
| dc.source.beginpage | 11.4 | |
| dc.source.conference | IEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019) | |
| dc.source.conferencedate | 6/03/2019 | |
| dc.source.conferencelocation | Brussels Belgium | |
| dc.title | Electromigration activation energies in ruthenium interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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