Publication:
MEMS test, yield and reliability
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-18T15:54:27Z | |
| dc.date.available | 2021-10-18T15:54:27Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16980 | |
| dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
| dc.source.conferencedate | 2/05/2010 | |
| dc.source.conferencelocation | Anaheim, CA USA | |
| dc.title | MEMS test, yield and reliability | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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