Publication:
Ultra low-k dielectrics damage under VUV and EUV radiation
Date
| dc.contributor.author | Zyryanov, S. | |
| dc.contributor.author | Braginsky, O. | |
| dc.contributor.author | Kovaev, A. | |
| dc.contributor.author | Lopaev, D. | |
| dc.contributor.author | Mankelevich, Y. | |
| dc.contributor.author | Rakhimova, T. | |
| dc.contributor.author | Rakhimov, A. | |
| dc.contributor.author | Vasilieva, A. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.date.accessioned | 2021-10-20T19:46:34Z | |
| dc.date.available | 2021-10-20T19:46:34Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21940 | |
| dc.source.beginpage | CT2.00005 | |
| dc.source.conference | 65th Gaseous Electronics Conference | |
| dc.source.conferencedate | 22/10/2012 | |
| dc.source.conferencelocation | Austin USA | |
| dc.title | Ultra low-k dielectrics damage under VUV and EUV radiation | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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