Investigation of nanoscopic controlled material removal by doped diamond tips for semiconductor device analysis

dc.contributor.author	Gomes, Oliver
dc.contributor.author	Hantschel, Thomas
dc.contributor.author	Pierre, E.
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Hantschel, Thomas
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Hantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned	2021-10-22T01:40:02Z
dc.date.available	2021-10-22T01:40:02Z
dc.date.issued	2014
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23864
dc.identifier.url	http://www.dgm.de/dgm/friction_wear/images/finalprogramme.pdf
dc.source.conference	European Symposium on Friction, Wear and Wear Resistance
dc.source.conferencedate	6/05/2014
dc.source.conferencelocation	Karlsruhe Germany
dc.title	Investigation of nanoscopic controlled material removal by doped diamond tips for semiconductor device analysis
dc.type	Oral presentation
dspace.entity.type	Publication
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