Publication:

Patterning and metallization options for advanced contact module integration

Date

2009
Proceedings Paper
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dc.contributor.authorDemuynck, Steven
dc.contributor.imecauthorDemuynck, Steven
dc.date.accessioned2021-10-17T21:55:25Z
dc.date.available2021-10-17T21:55:25Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15220
dc.source.beginpage795
dc.source.conferenceInternational Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate7/10/2009
dc.source.conferencelocationSendai Japan
dc.source.endpage796
dc.title

Patterning and metallization options for advanced contact module integration

dc.typeProceedings paper
dspace.entity.typePublication
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