Publication:
Integrating diffusionless anneals into advanced CMOS technologies
Date
| dc.contributor.author | Surdeanu, Radu | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Severi, Simone | |
| dc.contributor.author | Satta, Alessandra | |
| dc.contributor.author | Pawlak, Bartek | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Dachs, C.J.J. | |
| dc.contributor.author | Henson, Kirklen | |
| dc.contributor.author | McCoy, S. | |
| dc.contributor.author | Gelpey, J.C. | |
| dc.contributor.imecauthor | Severi, Simone | |
| dc.contributor.imecauthor | Pawlak, Bartek | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.date.accessioned | 2021-10-15T16:31:32Z | |
| dc.date.available | 2021-10-15T16:31:32Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9654 | |
| dc.source.beginpage | 180 | |
| dc.source.conference | Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM | |
| dc.source.conferencedate | 15/09/2004 | |
| dc.source.conferencelocation | Tokyo Japan | |
| dc.source.endpage | 181 | |
| dc.title | Integrating diffusionless anneals into advanced CMOS technologies | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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