Publication:

Corrosion of aluminum alloys during drying of metallized wafers

Date

1998
Proceedings Paper
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dc.contributor.authorVos, Rita
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.authorHatcher, Z.
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-01T09:41:59Z
dc.date.available2021-10-01T09:41:59Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3134
dc.source.beginpage569
dc.source.conferenceProceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
dc.source.conferencedate31/08/1997
dc.source.conferencelocationParis France
dc.source.endpage578
dc.title

Corrosion of aluminum alloys during drying of metallized wafers

dc.typeProceedings paper
dspace.entity.typePublication
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